Blank Cover Image

Polycrystalline Silicon Thin Film Transistors With Gate Oxides Deposited by LPCVD Using Tetraethylorthosilicate (TEOS)

Author(s):
Publication title:
Proceedings of the fourth Symposium on Thin Film Transistor Technologies
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-22
Pub. Year:
1998
Page(from):
143
Page(to):
148
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772167 [1566772168]
Language:
English
Call no.:
E23400/98-22
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Processing of Silicon Oxides Thin Films by Thermal LPCVD Starting from TEOS Mixtures

Vamvakas, Vassilis Em., Davazoglou, Dimitris, Vahlas, Constantin

MRS - Materials Research Society
7 Conference Proceedings Calculation of the infrared optical constants of LPCVD and thermally grown SiO2 films by measurements of reflection in non normal incidence

Zogopoulos, K., Vamvakas, V. Em., Davazoglou, D.

Electrochemical Society
2 Conference Proceedings Arrangement of Silicon and Oxygen Atoms in Low Pressure Chemically Vapor Deposited SiO2 Films by SiH4-02 and TEOS Chemistries: Comparison With Thermally Grown …

Vamvakas, V., Pappa, A., Davazoglou, D.

Electrochemical Society
8 Conference Proceedings Thin film transistors fabricated in laser crystallized chemically vapor deposited amorphous silicon films on quartz substrates

Kouvatsos, D. N., Vbutsas, A. T., Papaioannou, G. J.

Electrochemical Society
3 Conference Proceedings Fabrication Characteristics of Midgap Metal Gates Compatible With Thin SiO2 Films Using Low Pressure Chemically Vapor Deposited Tungsten Films

Kouvatsos, D.N., Ioannou-Sougleridis, V., Tsevas, S., Davazoglou, D., Christoforou, F., Boukouras, C.

Electrochemical Society
9 Conference Proceedings FLUORINATED GATE OXIDE FILMS UTILIZED IN POLYSILICON THIN FILM TRANSISTORS

Kouvatsos, Dimitrios N., Kung, Ji-Ho, Hatalis, Miltiadis K., Jaccodine, Ralph J.

Materials Research Society
4 Conference Proceedings Optical Properties of Undoped, Phosphorous Doped and Oxidized LPCVD Polycrystalline Silicon Films Obtained by Transmission and FTIR Measurements

Davazoglou, D., Kouvatsos, D., Valamontes, E.

Electrochemical Society
10 Conference Proceedings An Investigation of the Electrically Active Defects in poly-Si Thin Film Transistors

Exarchos, M., Papaioannou, G.J., Kouvatsos, D.N., Voutsas, A.T.

Electrochemical Society
5 Conference Proceedings Thermochemistry and Composition of LPCVD Silicon Oxide Films Grown from NH3TEOS Mixtures

Vahlas, C., Davazoglou, D., Vamvacas, V.E., de Parseval, P.

Electrochemical Society
11 Conference Proceedings Unhydrogenated Polycrystalline Silicon-Germanium Thin Film Transistors by LPCVD

Guillet, D., Helen, Y., Rogel, R., Sarret, M., Bonnaud, O.

Electrochemical Society
6 Conference Proceedings Silicon (Oxy)Nitride Thin Films Deposited by LPCVD from SiCl2H2-NH3-N2O Mixtures of Variable Composition

Davazoglou, D., Iliadis, A. A.

MRS - Materials Research Society
12 Conference Proceedings Optical Properties of Low Pressure Chemically Vapor Deposited Silicon Oxynitride Films From SiCl2H2-NH3-N2O Mixtures

Davazoglou, D.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12