Blank Cover Image

Nickel Induced Lateral Crystallization of Amorphous Silicon Thin Film Transistor by Rapid Thcrmal Anneal

Author(s):
Publication title:
Proceedings of the fourth Symposium on Thin Film Transistor Technologies
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-22
Pub. Year:
1998
Page(from):
76
Page(to):
83
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772167 [1566772168]
Language:
English
Call no.:
E23400/98-22
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Nickel Metal Induced Lateral Crystallization of Patterned Amorphous Silicon Thin Film

G. Nakagawa, T. Asano

Trans Tech Publications
7 Conference Proceedings Effect Of Ramp Annealing To Ni Induced Lateral Crystallization Of Amorphous Silicon

Chan, M., Ko, P. K., Poon, M. C., Shivani, S.

Materials Research Society
2 Conference Proceedings Polysilicon TFT Hydrogenation Using a Backside Nitride Layer

Lam, L.K., Chen, D.L., Ast, D.G.

Electrochemical Society
8 Conference Proceedings Aluminum-induced lateral crystallization of amorphous silicon thin films

Rao,R., Xu,Z., Zou,X., Sun,G.

SPIE - The International Society for Optical Engineering
3 Conference Proceedings On Mechanism Of Nickel Diffusion During Metal Induced Lateral Crystallization Of Amorphous Silicon

Myasnikov, A.M., Poon, M.C., Chan, P.C., Ng, K.L., Chan, M.S., Chan, W.Y., Singla, S., Yuen, C.Y.

Materials Research Society
9 Conference Proceedings HYDROGENATION EFFECT OF AMORPHOUS SILICON THIN FILM TRANSISTORS BY ATMOSPHERIC PRESSURE CVD

Ahn, B.C., Kim, J.H., Kim, D.G., Moon, B.Y., Kim, K.N., Lee, C.W., Jang, J.

Materials Research Society
4 Conference Proceedings Pd Induced Lateral Crystallization of Amorphous Silicon Thin Films at Low Temperature

Lee, S.W., Jeon, Y.C., Joo, S.K.

Electrochemical Society
10 Conference Proceedings LASER DOPING AND CRYSTALLIZATION OF AMORPHOUS SILICON THIN FILMS

Boyce, J. B., Anderson, G. B., Carey, P. G., Fork, D. K., Johnson, R. I., Mei, P., Ready, S. E., Smith, P. M.

MRS - Materials Research Society
5 Conference Proceedings Low Temperature Polycrystalline Silicon Thin Film Transistors Fabricated by Electroless Plating Ni Induced Crystallization of Amorphous Si

Chao, C.-W., Sermon Wu, Y.C., Chen, Y.-C., Hu, G.-R., Feng, M.-S.

Electrochemical Society
11 Conference Proceedings Influence of AC-Voltage on the Crystallization of Amorphous Silicon Thin Film during Field Aided Lateral Crystallization Process

Choi, S. H., Kim, Y. B., Wang, Y. H., Choi, D. K.

Trans Tech Publications
6 Conference Proceedings Polysilicon Thin Film Transistors on Glass-Ceramic Substrates

Krasulya, S.M., Nemchuk, N.I., Ast, D.G., Couillard, J.G.

Electrochemical Society
12 Conference Proceedings CRYSTALLIZATION OF AMORPHOUS LPCVD SILICON FILMS AND APPLICATION TO BIPOLAR AND THIN FILM TRANSISTORS

hatalis, M. K., Greve, D. W.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12