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High-Performance Polycrystalline Silicon TFTs Fabricated Using the SPC and ELA Merhods*

Author(s):
Hamada, H.
Aya, Y.
Abe, H.
Nouda, T.
Hirano, K.
Miyai, Y.
1 more
Publication title:
Proceedings of the fourth Symposium on Thin Film Transistor Technologies
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-22
Pub. Year:
1998
Page(from):
11
Page(to):
24
Pages:
14
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772167 [1566772168]
Language:
English
Call no.:
E23400/98-22
Type:
Conference Proceedings

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