A Study on the Wet Etching Behavior of CoNbZr/Cu/CoNbZr Multi-Layer Films Formed by RF Magnetron Sputtering

A Study on the Wet Etching Behavior of CoNbZr/Cu/CoNbZr Multi-Layer Films Formed by RF Magnetron Sputtering

Author(s):

Publication title:

Proceedings of the Fifth International Sympposium on Magnetic Materials, Processes, and Devices : applications to storage and microelectromechanical systems (MEMS)

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

98-20

Pub. Year:

1998

Page(from):

671

Page(to):

679

Pages:

9

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772143 [1566772141]

Language:

English

Call no.:

E23400/98-20

Type:

Conference Proceedings

Details

TDL ID:	ZA00013923
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Magnetic Materials, Processes, and Devices ; Meeting of the Electrochemical Society
Conf. info. (Number):	5th ; 194th
Conf. info. (Venue):	Boston, Massachusetts, USA
Conf. info. (Date):	1998.11.01-1998.11.06

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