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Deep X-ray Lithography Based Fabrication of Rare-Earth Permanent Magnets and their Application to Microactuators

Author(s):
Publication title:
Proceedings of the Fifth International Sympposium on Magnetic Materials, Processes, and Devices : applications to storage and microelectromechanical systems (MEMS)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-20
Pub. Year:
1998
Page(from):
312
Page(to):
326
Pages:
15
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772143 [1566772141]
Language:
English
Call no.:
E23400/98-20
Type:
Conference Proceedings

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