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The Role of Inert Gases in Reactive Ion Etching of Al2O3 -TiC (N58) Mixed Phases for Slider Air Bearing Surface Patterning

Author(s):
Nguyen, S.V.
Perez, D.
Craig, R.
Straub, M.
Ting, A.
Hsiao, R.
Hwang, C.
Haney, D.
Neumann, T.
4 more
Publication title:
Proceedings of the Fifth International Sympposium on Magnetic Materials, Processes, and Devices : applications to storage and microelectromechanical systems (MEMS)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-20
Pub. Year:
1998
Page(from):
115
Page(to):
122
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772143 [1566772141]
Language:
English
Call no.:
E23400/98-20
Type:
Conference Proceedings

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