Effect of Substrate Defects on GOI of Ultra-Thin Gate Oxides
- Author(s):
- Publication title:
- Proceedings of the Fifth International Symposium on High Purity Silicon V
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 98-13
- Pub. Year:
- 1998
- Page(from):
- 258
- Page(to):
- 263
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772075 [1566772079]
- Language:
- English
- Call no.:
- E23400/98-13
- Type:
- Conference Proceedings
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