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Low-k Integration Issues for 0.18 um Devices

Author(s):
Publication title:
Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-6
Pub. Year:
1998
Page(from):
178
Page(to):
184
Pages:
7
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772006 [1566772001]
Language:
English
Call no.:
E23400/98-6
Type:
Conference Proceedings

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