Damascene Electroplating for Copper Interconnections
- Author(s):
- Publication title:
- Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 98-6
- Pub. Year:
- 1998
- Page(from):
- 48
- Page(to):
- 58
- Pages:
- 11
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772006 [1566772001]
- Language:
- English
- Call no.:
- E23400/98-6
- Type:
- Conference Proceedings
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