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AN EVAULATION OF METALLIC IMPURITY CLUSTER ON SILICON WAFER SURFACE BY SC I REPEAT CLEANING

Author(s):
Publication title:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-1(2)
Pub. Year:
1998
Page(from):
1541
Page(to):
1548
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771931 [1566771935]
Language:
English
Call no.:
E23400/98-1
Type:
Conference Proceedings

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