Blank Cover Image

INVITED: SILICON-GERMANIUM PROCESS TECHNOLOGY

Author(s):
Publication title:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-1(2)
Pub. Year:
1998
Page(from):
1406
Page(to):
1417
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771931 [1566771935]
Language:
English
Call no.:
E23400/98-1
Type:
Conference Proceedings

Similar Items:

Freeman, G., Schonenberg, K., Ahlgren, D., Jeng, S-J., Nguyen-Ngoc, D., Stein, K., Colavito, D., Subbanna, S., Harame, …

MRS - Materials Research Society

Avset, B.S.

Electrochemical Society

Dunn, J., Joseph, A., Harame, D., Nowak, E.J., Meyerson, B.S.

Electrochemical Society

Hekmatshoar, B., Shahrjerdi, D., Mohajerzadeh, S., Khakifirooz, A., Robertson, M., Soliemani, E.Asl

Materials Research Society

Mathew, S.J., Dubbelday, W.B., Cressler, J.D., Ott, J., Chu, J.O., Meyerson, B.S., Kavanagh, K.L., Lagnado, I.

Electrochemical Society

MEYERSON, B. S.

American Institute of Chemical Engineers

Meyerson S. B.

Kluwer Academic Publishers

Tweet, D.J, Hsu, S.T., Evans, D.R., Ulrich, B., Ono, Y., Stecker, L.

Electrochemical Society

Harame, D., Subbanna, S., Dunn, J., St Onge, S.A., Freeman, G., Malinowski, J., Groves, R., Joseph, A., Ahlgren, D., …

Electrochemical Society

Kelsall, R.W., Ikonic, Z., Harrison, P., Lynch, S.A., Bates, R., Paul, D.J., Norris, D.J., Liew, S.L., Cullis, A.G., …

SPIE-The International Society for Optical Engineering

St Onge, S., Joseph, A., Lanzerotti, L., Feiichenfeld, N., Coolbaugh, D., Orner, B., Dunn, J., Harame, D.

Electrochemical Society

12 Conference Proceedings Besoi using a Silicon Germanium Etch Stop

Li, X., Gay, D.L., McNeill, D.W., Armstrong, B.M., Gamble, H.S.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12