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EFFLUENT MONITORING WITH FTIR SPECTROSCOPY FOR LOW OPEN AREA OXIDE ETCH ENDPOINT DETECTION

Author(s):
Lu, E.
Abraham, I.C.
Yang, Q.
Rasmussen, D.
Woods, R.C.
Anderson, H.M.
1 more
Publication title:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-1(2)
Pub. Year:
1998
Page(from):
1250
Page(to):
1261
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771931 [1566771935]
Language:
English
Call no.:
E23400/98-1
Type:
Conference Proceedings

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