Blank Cover Image

SILICIDE AS DOPANT SOURCE: ULTRASHALLOW N AND P JUNCTIONS IN SILICON

Author(s):
Publication title:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-1(2)
Pub. Year:
1998
Page(from):
1224
Page(to):
1231
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771931 [1566771935]
Language:
English
Call no.:
E23400/98-1
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Enhanced Dissolution of Extrinsic Dislocation Loops in Silicon Annealed in NH3

Herner, S. B., Krishnamoorthy, V., Jones, K. S., Mogi, T. K., Gossmann, H-J.

MRS - Materials Research Society
7 Conference Proceedings Novel Methods For Ultrashallow Low Resistance Junction Formation

S. H. Jain, P. Grifin, J. Plummer

Electrochemical Society
2 Conference Proceedings BORON-ENHANCED-DIFFUSION OF BORON FROM ULTRA- LOW-ENERGY BORON IMPLANTATION

Agarwal, A., Eaglesham, D.J., Gossmann, H.-J., Pelaz, L., Herner, S.B., Jacobson, D.C., Haynes, T.E., Erokhin, Yu E.

Electrochemical Society
8 Conference Proceedings PRREPARATION AND CHARACTERIZATION OF EPITAXIAL YYTRIUM SILICIDE ON (111) SILICON

Gurvitch, M., Levi, A. F. J., Tung, R. T., Nakahara, S.

Materials Research Society
3 Conference Proceedings SURFACE STUDIES OF SILICON WITH A HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPE

Gibson, J.M., McDonald, M.L., Unterwald, F.C., Gossmann, H.-J., Bean, J.C., Tung, R.T.

Materials Research Society
9 Conference Proceedings The Effect of TiSi2 Film Thickness and Growth on the Point Defect Perturbance in Si

Hemer, S.B., Jones, K.S., Gossman, H.-J., Tung, R.T., Poate, J.M., Luftman, H.S.

Electrochemical Society
4 Conference Proceedings UNDERSTANDING AND CONTROLLING TRANSIENT ENHANCED DOPANT DIFFUSION IN SILICON

Stolk, P. A., Gossmann, H.-J., Eaglesham, D. J., Jacobson, D. C., Luftman, H. S., Poate, J. M.

MRS - Materials Research Society
10 Conference Proceedings THE FORMATION OF THIN LAYERS AND DOBLE HETEROSTRUCTURES OF EPITAXIAL SILICIDES

Tung, R.T., Gibson, J.M.

Materials Research Society
5 Conference Proceedings *ELECTRICAL PROPERTIES OF EPITAXIAL SILICIDE-SILICON INTERFACES

Tung, R.T., Levi, A.F.J., Gibson, J.M., Ng, K.K., Chantre, A.

Materials Research Society
11 Conference Proceedings Atomic-Scale Imaging of Dopant Atom Distributions Within Silicon 5-Doped Layers

Citrin, P. H., Gossmann, H. J., Muller, D. A., Silcox, J., Vanfleet, R.

Materials Research Society
6 Conference Proceedings Effect of Oxygen Pressure on Magnesium Oxide Dielectrics Grown on GaN by Plasma Assisted Gas Source Molecular Beam Epitaxy

Onstine, A.H., Gila, B.P., Kim, J., Stodilka, D., Allums, K., Abernathy, C.R., Ren, F., Pearton, S.J.

Materials Research Society
12 Conference Proceedings Proton Irradiation Effects on Scandium Oxide/Gallium Nitride MOS Diodes

Allums, K., Luo, B., Mehandru, R., Gila, B.P., Dwivedi, R., Fogarty, T.N., Wilkins, R., Abernathy, C.R., Ren, F., …

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12