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EVALUATION OF PHYSICAL AND ELECTRICAL PROPERTIES OF MOLYBDENUM IN SILICON FOR IC PROCESSING

Author(s):
Benton, J.L.
Jacobson, D.C.
Jackson, B.
Johnson, J.A.
Eaglesham, D.J.
Stevie, A.
Becerro, J.
2 more
Publication title:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-1(2)
Pub. Year:
1998
Page(from):
1213
Page(to):
1223
Pages:
11
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771931 [1566771935]
Language:
English
Call no.:
E23400/98-1
Type:
Conference Proceedings

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