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SEGREGATION GEY?ERING BY IMPLANTATION-FORMED CAVITIES AND B-Si PRECIPITATES IN SILICON

Author(s):
Myers, S.
Petersen, G.A.
Follstaedt, D.M.
Seager, C.H.
Headly, T.J.
Michael, J.R.
Deweerd, W.
Koops, G.
Verheyden, J.
Pattyn, H.
5 more
Publication title:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-1(2)
Pub. Year:
1998
Page(from):
1150
Page(to):
1162
Pages:
13
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771931 [1566771935]
Language:
English
Call no.:
E23400/98-1
Type:
Conference Proceedings

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