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LOW TEMPERATURE CLEAN FOR Si/SiGe EPITAXY FOR CMOS INTEGRATION OF HETEROJUNCTION BIPOLAR TRANSISTORS

Author(s):
Wolansky, D.
Tillack, B.
Blum, K.
Bolze, K.D.
Glowatzki, K.D.
Koepke, K.
Kroeger, D.
Kurps, R.
Ritter, G.
Schley, P.
5 more
Publication title:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-1(1)
Pub. Year:
1998
Page(from):
812
Page(to):
821
Pages:
10
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771931 [1566771935]
Language:
English
Call no.:
E23400/98-1
Type:
Conference Proceedings

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