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THE CHARACTERIZATION OF 0.1 pm LPD (LIGHT POINT DEFECT) PATTERNS IN MASS PRODUCTION OF SILICON WAFER WAFER

Author(s):
Oh, H.-S.
Maeng, H.-J.
Bae, K.-M.
Kim, J.-R.
Hong, Y.-K.
Shin, J.-S.
Kwon, J.-H.
Rozgonyi, G.A.
Lee, H.-L.
4 more
Publication title:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-1(1)
Pub. Year:
1998
Page(from):
707
Page(to):
726
Pages:
20
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771931 [1566771935]
Language:
English
Call no.:
E23400/98-1
Type:
Conference Proceedings

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