Blank Cover Image

Wafer Bonding of GaAs, InP, and Si Annealed without Hydrogen for Advanced Device Technologies

Author(s):
Roberds, B.E.
Choquette, K.D.
Geib, K.M.
Kravitz, S.H.
Twesten, R.D.
Farrens, S.N.
1 more
Publication title:
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-36
Pub. Year:
1997
Page(from):
592
Page(to):
597
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771894 [1566771897]
Language:
English
Call no.:
E23400/97-36
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Low-Temperature, In Situ, Plasma Activated Wafer Bonding

Roberds, B.E., Farrens, S.N.

Electrochemical Society
7 Conference Proceedings Comparison of fabrication approaches for selectively oxidized VCSEL arrays

Geib,K.M., Choquette,K.D., Allerman,A.A., Briggs,R.D., Hindi,J.J.

SPIE - The International Society for Optical Engineering
2 Conference Proceedings An AFM Study on the Roughness of Silicon Wafers Correlated with Direct Wafer Bonding

Roberds, B., Farrens, S.

Electrochemical Society
8 Conference Proceedings LOW TEMPERATURE SILICON DIRECT BONDING

B.B. Roberds, S.N. Farrens

Electrochemical Society
3 Conference Proceedings Comparison of techniques for bonding VCSELs directly to ICs

Pu,R., Hayes,E.M., Wilmsen,C.W., Choquette,K.D., Hou,H.Q., Geib,K.M.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings ANALYSIS OF BOND CHARACTERISTICS IN SIDIRECT-BONDED MATERIALS

S.N. Farrens, B.E. Roberds, J.K. Smith, C.B. Hunt

Electrochemical Society
4 Conference Proceedings Short-wavelength bottom-emitting VCSELs

Choquette,K.D., Barton,J.S., Geib,K.M., Allerman,A.A.

SPIE - The International Society for Optical Engineering
10 Conference Proceedings Microstructure and interface properties of laterally oxidized AlxGa1-xAs

Twesten,R.D., Follstaedt,D.M., Choquette,K.D.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Fabrication,packaging,and performance of VCSELs and photodetectors for space applications

Briggs,R.D., Armendariz,M.G., Geib,K.M., Choquette,K.D., Serkland,D.K.

SPIE - The International Society for Optical Engineering
11 Conference Proceedings Beginning-to-end wafer bonding for advanced optical systems (Invited Paper)

Farrens, S.N., Lindner, P., Dwyer, S., Wimplinger, M.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Single transverse mode selectively oxidized vertical-cavity lasers

Choquette,K.D., Geib,K.M., Briggs,R.D., Allerman,A.A., Hindi,J.J.

SPIE - The International Society for Optical Engineering
12 Conference Proceedings High-performance vertical-cavity laser,driver,and receiver arrays for optical interconnects

Choquette,K.D., Hietala,V.M., Geib,K.M., Briggs,R.D., Allerman,A.A., Hindi,J.J.

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12