Blank Cover Image

ORGANIC CONTAMINATION ON SILICON WAFER SURFACES IN PROCESSING ENVIRONMENT

Author(s):
Publication title:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-35
Pub. Year:
1997
Page(from):
513
Page(to):
520
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771887 [1566771889]
Language:
English
Call no.:
E23400/97-35
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Organic Contamination on Si Wafers in Fab Environments and its Effects on Gate Oxide Integrity

Jeon, J., Watanabe, S., Tanishima, M., Sugimoto, F., Ogle, B.

Electrochemical Society
7 Conference Proceedings Surface Photovoltage Characterization of Heavy Metal Contamination and Wafer Cleaning Efficiency in Wet Chemical Processes

Rosato, J.J., Hall, R.M., Parry, T.B., Kelly, J.D., Butler, J.N., Jarvis, T.D., Lindquist, P.G.

Electrochemical Society
2 Conference Proceedings EVALUATION TECHNOLOGY FOR TIME-DEPENDENT ORGANIC CONTAMINATION ON SILICON WAFER SURFACES

Habuka, H., Ishiwari, S., Kato, H.

Electrochemical Society
8 Conference Proceedings A flow-channel cell for measurement of metallic contamination in silicon wafer processing

Matlosz, M., Berend, P., Coutelle, D., Simon, P.

Electrochemical Society
3 Conference Proceedings EVALUATION TECHNOLOGY FOR TIME-DEPENDENT ORGANIC CONTAMINATION ON SILICON WAFER SURFACES

Habuka, H., Ishiwari, S., Kato, H.

Electrochemical Society
9 Conference Proceedings Silicon Surfaces for Hydrophobic Wafer Bonding

Bergh, M., Tiensuu, St., Keskitalo, N., Forsberg, M.

Electrochemical Society
4 Conference Proceedings Study of Organic Contaminants Analysis using TD-GCMS on Silicon Wafer Surfaces

T. Taira, Y. Shiramizu, M. Watanabe, N. Kawai

Electrochemical Society
10 Conference Proceedings SURFACE METAL CONTAMINATION ON SILICON WAFERS MEASURED BY SurfaceSIMS

Smith, Stephen P., Hitzman, C.J., Hockett, R.S.

Electrochemical Society
5 Conference Proceedings Organic contamination on wafers surfaces: measurement techniques and deposition kinetics

Buegler, J., Zielonka, G., Pfitzner, L., Ryssel, H., Schottler, M.

Electrochemical Society
11 Conference Proceedings MICRO-CONTAMINATION OF COPPER AND SILVER ON SILICON WAFER SURFACES

Cheng, X., Gu, C., Feng, Z.-D.

Electrochemical Society
6 Conference Proceedings THE DUCTILE MODE GRINDING TECHNOLOGY APPLIED TO SILICON WAFERING PROCESS

Abe, T., Nakazato, Y., Daito, M., Kanai, A., Miyashita, M.

Electrochemical Society
12 Conference Proceedings Organic Contamination of Silicon Wafer in Clean Room Air and Its Impact to Gate Oxide Integrity

Imafuku, D., Mizubayashi, W., Miyazaki, S., Hirose, M., Wakayama, Y., Kobayashi, S.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12