EFFICIENCY OF OZONATED DI WATER IN REMOVING ORGANIC CONTAMINATION
- Author(s):
Kenens, C. De Gendt, S. Knotter, D.M. Loewenstein, L.M. Meuris, M. Vandervorst, W. Heyns, M.M. - Publication title:
- Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 97-35
- Pub. Year:
- 1997
- Page(from):
- 247
- Page(to):
- 255
- Pages:
- 9
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771887 [1566771889]
- Language:
- English
- Call no.:
- E23400/97-35
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
APPLICATION OF MOIST OZONE GAS PHASE FOR REMOVAL OF RESIST AND ORGANIC CONTAMINATION IN A NOVEL TANK TYPE PROCESSOR
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
9
Conference Proceedings
VAPOR PHASE DECOMPOSITION - DROPLET COLLECTION EVALUATION OF A WAFER SURFACE PREPARATION SYSTEM
Electrochemical Society |
4
Conference Proceedings
THE REMOVAL OF ORGANIC CONTAMINATION BY 03/DI-WATER PROCESSES: A THEORETICAL STUDY
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
11
Conference Proceedings
SURFACE CHARACTERISATION OF Si AFTER HF TREATMENTS AND ITS INFLUENCE ON THE DIELECTRIC BREAKDOWN OF THERMAL OXIDES
Materials Research Society |
6
Conference Proceedings
Growth and Physical Properties of MOCVD-Deposited Hafnium Oxide Films and Their Properties on Silicon
Materials Research Society |
Electrochemical Society |