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Novel Low-k Dielectrics Based on DLC Materials

Author(s):
Publication title:
Proceedings of the Fifth International Symposium on Diamond Materials
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-32
Pub. Year:
1997
Page(from):
512
Page(to):
520
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771856 [1566771854]
Language:
English
Call no.:
E23400/97-32
Type:
Conference Proceedings

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