Charge Damage Caused by Electron Shading Effect During Sputter Etch Pre-Cleaning of Via Contact
- Author(s):
- Publication title:
- Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 97-30
- Pub. Year:
- 1997
- Page(from):
- 175
- Page(to):
- 182
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771832 [1566771838]
- Language:
- English
- Call no.:
- E23400/97-30
- Type:
- Conference Proceedings
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