47. Electroless Copper Deposition on TiN
- Author(s):
- Publication title:
- Proceedings of the Symposium on Fundamental Aspects of Electrochemical Deposition and Dissolution Including Modeling
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 97-27
- Pub. Year:
- 1997
- Page(from):
- 521
- Page(to):
- 526
- Pages:
- 6
- Pub. info.:
- Pennington, New Jersey: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771801 [1566771803]
- Language:
- English
- Call no.:
- E23400/97-27
- Type:
- Conference Proceedings
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