Optimization of Si02 Atmospheric Deposition in Continuous Belt Systems
- Author(s):
- Publication title:
- Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 97-25
- Pub. Year:
- 1997
- Page(from):
- 1167
- Page(to):
- 1174
- Pages:
- 8
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771788 [1566771781]
- Language:
- English
- Call no.:
- E23400/97-25
- Type:
- Conference Proceedings
Similar Items:
MRS - Materials Research Society |
Electrochemical Society |
Trans Tech Publications |
8
Conference Proceedings
Modeling Approach Towards the Dislocation Density Reduction in InP LEC Grown Crystals
American Institute of Chemical Engineers |
Electrochemical Society |
9
Conference Proceedings
Liquid Encapsulated Czochralski Growth Conditions Design Through Simplified Transient Models
American Institute of Chemical Engineers |
Electrochemical Society |
10
Conference Proceedings
Gas Phase and Surface Kinetics of Diamond-Like Carbon Films Growth in PECVD Reactors
MRS - Materials Research Society |
5
Conference Proceedings
Estimation of the Dopant Effect on the Surface Kinetics in CVD Systems Through the Charge-Transfer Theory
Electrochemical Society |
Trans Tech Publications |
Electrochemical Society |
12
Conference Proceedings
MOS C-t characteristics and gate oxide quality versus bulk iron contamination in epitaxial wafers
Electrochemical Society |