Advanced DRAM Capacitors Using Tantalum Pentoxide Process Technology
- Author(s):
Thakur, R.P.S. DeBoer, S.J. AI-Shareef, H.N. Gealy, D. Schuegraf, K. Singh, R. - Publication title:
- Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 97-8
- Pub. Year:
- 1997
- Page(from):
- 224
- Page(to):
- 234
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771351 [1566771358]
- Language:
- English
- Call no.:
- E23400/97-8
- Type:
- Conference Proceedings
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