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Capacitance Studies of Poly-alpha,alpha,alpha,'alpha'- tetrafluoro-p-xylylene (AF4) Films

Author(s):
Gaynor, J.F.
Cben, J.
Nguyen, H.
Brown, G.
Taylor, K.
Luttmer, J.D.
PIano, M.A.
Cleary, T.
Wing, J.
Kelly, J.
5 more
Publication title:
Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-8
Pub. Year:
1997
Page(from):
157
Page(to):
167
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771351 [1566771358]
Language:
English
Call no.:
E23400/97-8
Type:
Conference Proceedings

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