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Deposition and Characterization of SiOF Films for Multi-level IMD

Author(s):
Kim, H.-H.
Lee, S.-K.
Kim, S.-O.
Kim, Y.-H.
Kim, H.J.
Sohn, Y.-S.
Yang, H.-S.
Kim, C.-T.
Kim, D.-H.
4 more
Publication title:
Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-8
Pub. Year:
1997
Page(from):
148
Page(to):
156
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771351 [1566771358]
Language:
English
Call no.:
E23400/97-8
Type:
Conference Proceedings

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