Integration of Low-k Dielectric s for High Performance 0.18um Interconnects
- Author(s):
Singh, A. Dixit, G.A. List, R.S. Ralston, A.R.K. Aldrich, D. Russell, S.W. Nag, S. Gaynor, J. Jin, C. McKerrow, A.J. Lee, W. Havemann, R.H. Luttmer, J.D. - Publication title:
- Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 97-8
- Pub. Year:
- 1997
- Page(from):
- 102
- Page(to):
- 111
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771351 [1566771358]
- Language:
- English
- Call no.:
- E23400/97-8
- Type:
- Conference Proceedings
Similar Items:
MRS - Materials Research Society |
SPIE - The International Society of Optical Engineering |
2
Conference Proceedings
Investigations on the impacts of misalignment in the integration of 0.18-μ multilevel interconnect
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
10
Conference Proceedings
Process control and optimization of conventional metal process for 0.18-ヲフm logic technology
SPIE - The International Society for Optical Engineering |
MRS - Materials Research Society |
11
Conference Proceedings
Design,reticle,and wafer OPC manufacturability for the 0.18-ヲフm lithography generation
SPIE - The International Society for Optical Engineering |
Electrochemical Society |
12
Conference Proceedings
Synchronous and asynchronous multiplexer circuits for medical imaging realized in CMOS 0.18um technology
SPIE - The International Society of Optical Engineering |