Diffusion and Out-Diffusion Behavior of Fe in Si Wafer for Different Annealing

Diffusion and Out-Diffusion Behavior of Fe in Si Wafer for Different Annealing

Author(s):

Publication title:

Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

97-12

Pub. Year:

1997

Page(from):

452

Page(to):

457

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771399 [1566771390]

Language:

English

Call no.:

E23400/97-12

Type:

Conference Proceedings

Details

TDL ID:	ZA00013872
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Conf. info. (Number):	1997
Conf. info. (Venue):	Montréal, QC, Canada
Conf. info. (Date):	1997.05.06-1997.05.08

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