Blank Cover Image

Characterization Challenges for the ULSI Era

Author(s):
Shaffner, T.J.  
Publication title:
Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-12
Pub. Year:
1997
Page(from):
1
Page(to):
15
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771399 [1566771390]
Language:
English
Call no.:
E23400/97-12
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Characterization Challenges for the ULSI Era*

Shaffner,T.J.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Promises and challenges for free-space digital optics in switching systems beyond the year 2000

T.J. Cloonan

Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings Beam Characterization Techniques for ULSI

Shaffner, T.J.

Electrochemical Society
8 Conference Proceedings Lithography challenges of dual-damascence process in 0.13-μm era

Chen,L.-J., Shiu,L.-H., Tsai,C.-S., Chang,C.-H., Kang,T.-K., Chou,S.-Y.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings OXYGEN STACKING FAULT PATTERNS IN CZ SILICON CRYSTAL GROWTH

Shaffner, T.J.

Electrochemical Society
9 Conference Proceedings Challenge of automotive sensors

Giachino,J.M., Miree,T.J.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings INTRODUCTORY REMARKS - - DIAGNOSTIC ANALYSIS

Shaffner, T.J., Kawado, S.

Electrochemical Society
10 Conference Proceedings Anatomy of the slope discrepancy structure function: characterization of turbulence

Brennan, T.J.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings A MODEL RELATING OISF PATTERNS TO CZOCHRALSKI SILICON CRYSTAL GROWTH

Shaffner, T. J.

American Institute of Chemical Engineers
11 Conference Proceedings CHARACTERIZATION OF ErAs/GaAs AND GaAs/ErAs/Gas STRUCTURES

Zhu, Jane G., Palmstrom, Chris J., Mounier, Suzanne, Barry Carter, C.

Materials Research Society
6 Conference Proceedings Materials delivery challenges in ULSI processing

Loan,J.F., Sullivan,L.A., Sullivan,J.J.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings ERA - The processor challenge

Beerthuizen, P.G.

ESA Publications Division
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12