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Analysis of Interface States in Electrical Stressed Oxynitrided Gate Oxide Using Quasi-Static and Deep level Transient Spectroscopy Measurements

Author(s):
Belkouch, S.
Nguyen, T.K.
Landsberger, L.M.
Aktik, C.
Jean, C.
Kahrizi, M.
1 more
Publication title:
Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-10
Pub. Year:
1997
Page(from):
565
Page(to):
576
Pages:
12
Pub. info.:
Pennington, New Jersey: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771375 [1566771374]
Language:
English
Call no.:
E23400/97-10
Type:
Conference Proceedings

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