Evaluation of Deep Etching Techniques for Silicon Micromachined Pressure Sensor

Evaluation of Deep Etching Techniques for Silicon Micromachined Pressure Sensor

Author(s):

Publication title:

Proceedings of the Third International Symposium on Microstructures and Microfabricated Systems

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

97-5

Pub. Year:

1997

Page(from):

131

Page(to):

143

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771320 [1566771323]

Language:

English

Call no.:

E23400/970514

Type:

Conference Proceedings

Details

TDL ID:	ZA00013866
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Microstructures and Microfabricated Systems ; Meeting of the Electrochemical Society
Conf. info. (Number):	3rd ; 191st
Conf. info. (Venue):	Montreal, Canada
Conf. info. (Date):	1997.05.04-1997.05.09

Similar Items:

1 Conference Proceedings An Investigation of Corner Rounding to Strengthen Silicon Micromachined Pressure Sensor for Fusion-Bonded Wafers Chan, W., Sooriakumar, K., Bartholomew, K., Savage, T.S., Vanhoy, T. Electrochemical Society	7 Conference Proceedings Deep Anisotropic Etching of Silicon with Smooth Surface for Micromachining Applications Moshkalyov, S.A., Reyes-Betanzo, C., Swart, J.W. Electrochemical Society
2 Conference Proceedings A Comparative Study of Wet vs. Dry Isotropic Etch to Strengthen Silicon Micromachined Pressure Sensor Sooriakumar, K., Chan, Wendy, Savage, Timothy S., Fugate, Carol Electrochemical Society	8 Conference Proceedings Design of 60 Bar Silicon Micromachined Piezoresistive Pressure Sensor Ramani Seshamani, Rafiqul Islam, Ivan Saha, Kanakaraju,K., Jain,Y.K., AlexT.K. Narosa Publishing House
3 Conference Proceedings Surface Roughness of Silicon Diaphragm Due to Ionic Contamination During Electrochemical Etching of Silicon Sooriakumar, K., Pastirik, E.M., Chan, W.K., Schade, M.R. Electrochemical Society	9 Conference Proceedings Simultaneous Placement of Actuators and Sensors Gawronski,W.K. Society for Experimental Mechanics
4 Conference Proceedings Batch Fabrication of Media Isolated Absolute Pressure Sensors Sooriakumar, K., Monk, David J., Chan, Wendy, Vanhoy, Greg, Goldman, Ken Electrochemical Society	10 Conference Proceedings Pressure Protection Evaluation Program at Savannah River Site James K. Chan, John W. Ramsey American Society of Mechanical Engineers
5 Technical Paper An Integrated Silicon Bulk Micromachined Barometric Pressure Sensor for Engine Control Unit and External Mount Sooriakumar,K., Verma,Rajan, Maudie,Theresa, Shah,Mahesh Society of Automotive Engineers	11 Conference Proceedings Deep Reactive Ion Etching of Silicon Ayon, A.A., Chen, K-S., Lohner, K.A., Spearing, S.M., Sawin, H.H., Schmidt, M.A. Materials Research Society
6 Technical Paper An Integrated Silicon Bulk Micromachined Barometric Pressure Sensor for Engine Control Unit and External Mount Sooriakumar, K., Verma, Rajan, Maudie, Theresa, Shah, Mahesh Society of Automotive Engineers	12 Conference Proceedings Study of a Winter Monsoon Front over the South China Sea by Multi-Sensor Satellite and Weather Radar Data, and a Numerical Model W. Alpers, W.K. Wong, K.-F. Dagestad, P.W. Chan ESA Communications

1

2

3

4

5

6

7

8

9

10

11

12