Ion Implantation: The Critical Roles of Defects, Diffusion, and Dopant Profile Control
- Author(s):
- Publication title:
- ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 97-3
- Pub. Year:
- 1997
- Page(from):
- 297
- Page(to):
- 312
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771306 [1566771307]
- Language:
- English
- Call no.:
- E23400/970512
- Type:
- Conference Proceedings
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