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Ultrashallow Junctions and Salicide Technology for Advanced CMOS Devices

Author(s):
Ohguro, T.
Nakamura, S.
Saito, M.
Ono, S.
Harakawa, H.
Morifuji, E.
Yoshitomi, T.
Morimoto, T.
Momose, H.S.
Katsumata, Y.
Iwai, H.
6 more
Publication title:
ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-3
Pub. Year:
1997
Page(from):
275
Page(to):
296
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771306 [1566771307]
Language:
English
Call no.:
E23400/970512
Type:
Conference Proceedings

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