Silicon Wafer Thermal Processing: 300 mm Issues

Silicon Wafer Thermal Processing: 300 mm Issues

Author(s):

Publication title:

ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

97-3

Pub. Year:

1997

Page(from):

135

Page(to):

182

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771306 [1566771307]

Language:

English

Call no.:

E23400/970512

Type:

Conference Proceedings

Details

TDL ID:	ZA00013864
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Ultralarge Scale Integration Science and Technology
Conf. info. (Number):	6th
Conf. info. (Venue):	Montreal, Quebec, Canada
Conf. info. (Date):	1997.05.05-1997.05.09

Similar Items:

1 Conference Proceedings CHARACTERIZATION OF 300 mm SILICON POLISHED WAFERS Au, C., Messina, T., Goodall, R.K., Huff, H.R. Electrochemical Society	7 Conference Proceedings Dispersion in turns for species transport by electrophoresis and electro-osmotic flow Griffiths,S.K., Nilson,R.H. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Oxygen Precipitation Behaviour in 300 mm Polished Czochralski Silicon Wafers Ono, T., Rozgonyi, G.A., Au, C., Messina, T., Goodall, R.K., Huff, H.R. Electrochemical Society	8 Conference Proceedings Silicon wafer specifications and characterization capabilities:another perspective Goodall,R.K. SPIE-The International Society for Optical Engineering
3 Conference Proceedings Eliminating Silicon Crystal Defects Induced by Thermal and Gravitational Stresses Nilson, R.H., Griffiths, S.K. Electrochemical Society	9 Conference Proceedings INVITED: THE IMPACT OF THE 300mm SCALE-UP ON IC FAB PROCESS, METROLOGY, AND AUTOMATION EQUIPMENT Goodall, R.K. Electrochemical Society
4 Conference Proceedings Wafer flatness modeling for scanning steppers Goodall,R.K., Huff,H.R. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Irrotationality of uniform electro-osmosis Cummings,E.B., Griffiths,S.K., Nilson,R.H. SPIE - The International Society for Optical Engineering
5 Conference Proceedings Acoustic agitation for enhanced development of LIGA PMMA resists Nilson,R.H., Griffiths,S.K. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Measurement of Silicon Particles by Laser Surface Scanning and 365 Angle-Resolved Light Scattering Huff, H.R., Goodall, R.K., Williams, E., Woo, K-S., Liu, B.Y.H., Warner, T., Hirleman, D., Gildersleeve, K., Bullis, … Electrochemical Society
6 Conference Proceedings Conditions for Maximum Centerline Deposition Rates in Composites Fiber Coating by Chemical Vapor Infiltration Griffiths, S.K., Nilson, R.H. Electrochemical Society	12 Conference Proceedings Transport limitations in electrodeposition for LIGA microdevice fabrication Griffiths,S.K., Nilson,R.H., Bradshaw,R.W., Ting,A., Bonivert,O., Hachmann,J.T., Hruby,J.M. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12