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0.5 μm E/D AlGaAs/GaAs Heterostructure Field Effect Transistor Technology with DEFT Threshold Adjust Implant

Author(s):
Baca, A.G.
Sherwin, M.E.
Zolper, J.C.
Shul, R.J.
Briggs, R.D.
Heise, J.A.
Robertson, P.J.
Hafich, M.F.
3 more
Publication title:
Proceedings of the twenty-sixth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXVI)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-1
Pub. Year:
1997
Page(from):
186
Page(to):
189
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771283 [1566771285]
Language:
English
Call no.:
E23400/970510
Type:
Conference Proceedings

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