0.5 μm E/D AlGaAs/GaAs Heterostructure Field Effect Transistor Technology with DEFT Threshold Adjust Implant
- Author(s):
Baca, A.G. Sherwin, M.E. Zolper, J.C. Shul, R.J. Briggs, R.D. Heise, J.A. Robertson, P.J. Hafich, M.F. - Publication title:
- Proceedings of the twenty-sixth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXVI)
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 97-1
- Pub. Year:
- 1997
- Page(from):
- 186
- Page(to):
- 189
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771283 [1566771285]
- Language:
- English
- Call no.:
- E23400/970510
- Type:
- Conference Proceedings
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