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ECR-Plasma Deposited Oxygen-Free SiNx Films for Low and High Reflectivity Coatings for GaAs Based Devices

Author(s):
Sah, R.E.
Weimar, W.
Baumann, H.
Wagner, J.
Kiefer, R.
Muller, S.
1 more
Publication title:
Proceedings of the twenty-sixth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXVI)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-1
Pub. Year:
1997
Page(from):
178
Page(to):
185
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771283 [1566771285]
Language:
English
Call no.:
E23400/970510
Type:
Conference Proceedings

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