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Hydrogenation Effect of Heterostructured CMOS Thin-Film Transistors in Low Temperature (<-550℃) RTCVD Films

Author(s):
Lee, S.K.
Choe, S.M.
Ahn, C.G.
Chung, W.J.
Kwon, Y.K.
Kang, B.K.
Kim, O.
Park, Y.B.
Rhee, S.W.
4 more
Publication title:
Proceedings of the Third Symposium on Thin Film Transistor Technologies
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-23
Pub. Year:
1996
Page(from):
358
Page(to):
365
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771733 [1566771730]
Language:
English
Call no.:
E23400/970103
Type:
Conference Proceedings

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