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Microstructure and Preferred Orientation of Solid Phase Crystallized a-(Si/Si0.7Ge0.3) and a-(Si0.7Ge0.3/Si) Bilayer Films on SiO2

Author(s):
Publication title:
Proceedings of the Third Symposium on Thin Film Transistor Technologies
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-23
Pub. Year:
1996
Page(from):
206
Page(to):
214
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771733 [1566771730]
Language:
English
Call no.:
E23400/970103
Type:
Conference Proceedings

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