Blank Cover Image

High Quality Thin Gate Dielectric Using ECR N2O-Plasma for Future Poly-Si TFT Applications

Author(s):
Publication title:
Proceedings of the Third Symposium on Thin Film Transistor Technologies
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-23
Pub. Year:
1996
Page(from):
79
Page(to):
88
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771733 [1566771730]
Language:
English
Call no.:
E23400/970103
Type:
Conference Proceedings

Similar Items:

J.W. Lee, H.W. Kim, J.W. Han, M.S. Kim, B.D. Yoo, M.H. Kim, C.H. Lee, C.H. Lim, S.K. Hwang, C. Lee, D.J. Chung, S.G. …

Trans Tech Publications

Morimoto, N.I., Viana, C.E., da Silva, A.N.R.

Electrochemical Society

Manera, G.A., Diniz, J.A., Doi, I., Swart, J.W.

Electrochemical Society

Joshi, P.C., Ono, Y., Voutsas, A.T., Hartzell, J.W.

Electrochemical Society

Lee, S.J., Luan, H.F., Bai, W.P., Lee, C.H., Clark, B., Rabents, D., Myers, L., Kwang, D.L.

Electrochemical Society

Yeh, C-F., Wang, S.-C., Jeng, J.-N., Lu, C.-Y.

Electrochemical Society

Kim, I., Han, S.K., Kiether, W., Lee, S.J., Lee, C.H., Luan, H.F., Luo, Z., Rying, E., Wicaksana, Z.Wang D., Zhu, W., …

Electrochemical Society

Luan, H. F., Lee, S. J., Lee, C. H., Mao, A. Y., Vrtis, R., Roberts, D., Kwong, D. L.

MRS - Materials Research Society

Shin, Moon Young, Han, Sang-Myeon, Lee, Min-Cheol, Shin, Hee-Sun, Han, Min-Koo, Kwon, Jang-Yeon, Noguchi, Takashi

Materials Research Society

Lee, C.H., Luan, H.F, Bat, W.P., Lee, S.J., Jean, T.S., Roberts, D., Kwong, D.L.

Electrochemical Society

6 Conference Proceedings High-K gate dielectrics

Qi,W.-Y., Lee,B.H., Nieh,R., Kang,L., Jeon,Y., Onishi,K., Lee,J.C.

SPIE - The International Society for Optical Engineering

Joshi, P.C., Moriguchi, M., Crowder, M.A., Droes, S.R.T., Flores, J.S., Voutsas, A.T., Hartzell, J.W.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12