18 Optimized HF Solutions in ULSI Technology

18 Optimized HF Solutions in ULSI Technology

Author(s):

Publication title:

Proceedings of the Symposium on Environmental Aspects of Electrochemical Technology: applications in electronics

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

96-21

Pub. Year:

1996

Page(from):

250

Page(to):

263

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771719 [1566771714]

Language:

English

Call no.:

E23400/970283

Type:

Conference Proceedings

Details

TDL ID:	ZA00013854
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Environmental Aspects of Electrochemical Technology ; Meeting of the Electrochemical Society
Conf. info. (Number):	1996 ; 190th
Conf. info. (Venue):	San Antonio, TX, USA
Conf. info. (Date):	1996.10.07-1996.10.08

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