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11 Real-Time Monitoring of Wet Chemical Oxidation and Etching Processes on Semiconductor Surfaces for Process Optimization and Waste Minimization

Author(s):
Publication title:
Proceedings of the Symposium on Environmental Aspects of Electrochemical Technology: applications in electronics
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-21
Pub. Year:
1996
Page(from):
140
Page(to):
158
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771719 [1566771714]
Language:
English
Call no.:
E23400/970283
Type:
Conference Proceedings

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