Surface Damage and Passivation by Plasma Processing

Surface Damage and Passivation by Plasma Processing

Author(s):: Pang, S.W.
Publication title:: Proceedings of the Symposium on High Speed III-V Electronics for Wireless Applications and the twenty-fifth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXV)
Title of ser.:: Electrochemical Society Proceedings Series
Ser. no.:: 96-15
Pub. Year:: 1996
Page(from):: 249
Page(to):: 264
Pub. info.:: Pennington, NJ: Electrochemical Society
ISSN:: 01616374
ISBN:: 9781566771658 [156677165X]
Language:: English
Call no.:: E23400/963435
Type:: Conference Proceedings

Details

TDL ID:	ZA00013848
Series ID:	PA00000028
Conf. info. (Name):	Symposium on High Speed III-V Electronics for Wireless Applications ; State-of-the-Art Program on Compound Semiconductors - SOTAPOCS ; Meeting of the Electrochemical Society
Conf. info. (Number):	1996 ; 25th ; 190th
Conf. info. (Venue):	San Antonio, Texas, USA
Conf. info. (Date):	1996.10.06-1996.10.11

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