Blank Cover Image

Critical Issues in Rapid Thermal Processing of Compound Semiconductors

Author(s):
Publication title:
Proceedings of the Symposium on High Speed III-V Electronics for Wireless Applications and the twenty-fifth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXV)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-15
Pub. Year:
1996
Page(from):
43
Page(to):
48
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771658 [156677165X]
Language:
English
Call no.:
E23400/963435
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings ANALYSIS OF CRITICAL PARAMETERS AFFECTING THE TEMPERATURE UNIFORMITY DURING RAPID THERMAL PROCESSING

Nagabushnam, V., Singh, R. K., Thakur, R. P. S.

MRS - Materials Research Society
7 Conference Proceedings Silicidation and metallization issues using Rapid Thermal Processing

Maex K.

Kluwer Academic Publishers
2 Conference Proceedings Critical Issues of III-V Compound Semiconductor Processing

Pearton, S.J.

Electrochemical Society
8 Conference Proceedings Rapid Thermal Processing as a Photovoltaic Manufacturing Technology for the 21st Century

Singh, R., Rohatgi, A., Rajan, K., Venkataraman, S., Poole, K.F.

Electrochemical Society
3 Conference Proceedings IN-SITU RAPID ISOTHERMAL PROCESSING OF THIN EPITAXIAL DIELECTRIC FILMS ON SILICON AND COMPOUND SEMICONDUCTORS

Singh, R., Radpour, F., Narayan, J., Joshi, S.P., Rahmati, M., Anandakugan, S., Kahng, S.K.

Materials Research Society
9 Conference Proceedings Temperature Measurement Issues in Rapid Thermal Processing

DeWitt, D. P., Sorrell, F. Y., Elliott, J. K.

MRS - Materials Research Society
4 Conference Proceedings Silicon Wafer Thermal Processing: 300 mm Issues

Huff, H.R., Goodall, R.K., Griffiths, S.K., Nilson, R.H.

Electrochemical Society
10 Conference Proceedings THREE-DIMENSIONAL ASYMMETRICAL MODELING OF RAPID THERMAL ANNEALING OF SILICON WAFERS

Nagabushnam, V., Singh, R. K.

MRS - Materials Research Society
5 Conference Proceedings High Pressure Phase Transitions and Elastic Behaviour of Semimagnetic Semiconductors Pb1-x Mnx Te

Singh,R.K., Srivastava,A.

Trans Tech Publications
11 Conference Proceedings Rapid Thermal Processing of contacts and buffer layers for compound semiconductor device technology

Feng T., Christou A., Girginoudi D., Hatzopoulos Z.

Kluwer Academic Publishers
6 Conference Proceedings Direct Correlation Between Defects and Thermal Stress in Rapid Thermal Processing

Parihar, V., Venkataraman, S., Singh, R., Poole, K.F., Thakur, R.P.S.

Electrochemical Society
12 Conference Proceedings Critical Microscopic Processes in Semiconductor Lasers

Alam, M. A., Baraff, G. A., Hybertsen, MarkS., Smith, R. K.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12