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Influences on Film Selectivities in the Etching of Polycide Gates

Author(s):
Chinn, J.D.
Buseck, D.
Lill, Th.
Padmapani, N.
Price, J.B.
Burrows, R.
Rooein, M.
2 more
Publication title:
Proceedings of the eleventh International Symposium on Plasma Processing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-12
Pub. Year:
1996
Page(from):
313
Page(to):
321
Pages:
9
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771641 [1566771641]
Language:
English
Call no.:
E23400/962354
Type:
Conference Proceedings

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