Ion implantation processing of GaN epitaxial layers
- Author(s):
Tan, H.H. Williams, J.S. Zou, J. Cockayne, D.J.H. Pearton, S.J. Yuan, C. - Publication title:
- Proceedings of the First Symposium on III-V Nitride Materials and Processes
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 96-11
- Pub. Year:
- 1996
- Page(from):
- 142
- Page(to):
- 148
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771634 [1566771633]
- Language:
- English
- Call no.:
- E23400/962353
- Type:
- Conference Proceedings
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