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Growth and Doping of AlxGa1-xN Deposited Directly on α(6H)-SiC(0001) Substrates Via Organometallic Vapor Phase Epitaxy

Author(s):
Bremser, M.D.
Perry, W.G.
Edwards, N.V.
Zheleva, T.
Parikh, N.
Aspnes, D.E.
Davis, R.F.
2 more
Publication title:
Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-5
Pub. Year:
1996
Page(from):
402
Page(to):
407
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771559 [1566771552]
Language:
English
Call no.:
E23400/962104
Type:
Conference Proceedings

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