Contact etching process characterization by using angular XPS technique
- Author(s):
- Publication title:
- ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 95-30
- Pub. Year:
- 1995
- Page(from):
- 271
- Page(to):
- 280
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771221 [1566771226]
- Language:
- English
- Call no.:
- E23400/961027
- Type:
- Conference Proceedings
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