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Investigation of Bonded Silicon-Silicon-Interfaces Using Scanning Acoustic Microscopy

Author(s):
Schulze, S.
Albrecht, I.
Kosbi, K.
Gebhard, M.
Benecke, W.
Bosek, S.
1 more
Publication title:
Proceedings of the Second International Symposium on Microstructures and Microfabricated Systems
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-27
Pub. Year:
1995
Page(from):
309
Page(to):
318
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771238 [1566771234]
Language:
English
Call no.:
E23400/961024
Type:
Conference Proceedings

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