Blank Cover Image

ECR Etching of Group-III Nitride Binary and Ternary Films

Author(s):
Shul, R.J.
Howard, A.J.
Pearton, S.J.
Abernathy, C.R.
Variuli, C.B.
Barnes, P.A.
1 more
Publication title:
Proceedings of the Symposium on Wide Bandgap Semiconductors and Devices and the Twenty-Third State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIII)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-21
Pub. Year:
1995
Page(from):
217
Page(to):
230
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771160 [1566771161]
Language:
English
Call no.:
E23400/961020
Type:
Conference Proceedings

Similar Items:

Shul, R.J., Howard, A.J., Kilcoyne, S.P., Pearton, S.J., Abernathy, C.R., Vartuli, C.B., Barnes, P.A., Bozack, M.J.

Electrochemical Society

7 Conference Proceedings ECR, ICP and RIE plasma etching of GaN

Shul, R.J., McClellan, G.B., Rieger, D.J., Hafich, M.J., Drummond, T.J., Pearton, S.J., Abernathy, C.R., Constantine, …

Electrochemical Society

Shul, R. J., Ashby, C. I. H., Rieger, D. J., Howard, A. J., Pearton, S. J., Abernathy, C. R., Vartuli, C. B., Barnes, P. …

MRS - Materials Research Society

Lee, J.W., Pearton, S.J., Lambers, E.S., Mileham, J.R., Abernathy, C.R., Hobson, W.S., Ren, F., Shul, R.J.

Electrochemical Society

Vartuli, C.B., Pearton, S.J., Abernathy, C.R., Shul, R.J., Ren, F.

Electrochemical Society

Pearton, S.J., Shul, R.J., Wilson, R.G., Ren, F., Zavada, J.M., Abernathy, C.R., Vartuli, C.B., Lee, J.W., Mileham, …

Electrochemical Society

Ren, F., Pearton, S.J., Donovan, S., Abernathy, C.R., Cole, M.W.

Electrochemical Society

Vartuli, C. B., Lee, J. W., MacKenzie, J. D., Pearton, S. J., Abernathy, C. R., Shul, R. J.

MRS - Materials Research Society

Vartuli, C. B., Pearton, S. J., Abernathy, C. R., Shul, R. J., Kilcoyne, S. P., Crawford, M. Hagerott, Howard, A. J., …

MRS - Materials Research Society

Ren, F., Lothian, J.R., Pearton, S.J., Abernathy, C.R., Vartuli, C.B., Karlicek, B., Karlicek, R.F., Jr., MacKenzie, …

Electrochemical Society

Pearton, S.J., Vartuli, C.B., Shul, R.J., Zolper, J.C.

Electrochemical Society

Shul, R., Zhang, L, Baca, A., Han, J., Crawford, M., Willison, C., Pearton, S., Ren, F., Zolper, J., Lester, L.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12